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  1. DC discharge characteristics and fluorine atom yield in NF3/He

  2. DC discharge characteristics of NF3/He have been investigated experimentally under different experimental conditions, for example, different electrode materials, separations, flow rates of the gas NF3 or He, and series resistances. The optimum discha
  3. 所属分类:其它

    • 发布日期:2021-02-12
    • 文件大小:218112
    • 提供者:weixin_38727928