During June 1995 through September 1998, APL conducted a series of Warfare Analysis Laboratory Exercises (WALEXs) in support of the Naval Air Systems Command. The goal of these exercises was to examine a concept then known as the Air-Directed Surfac
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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthe