The metal-ferroelectric-metal (MFM) capacitor in the ferroelectric random access memory (FeRAM) embedded RFID chip is used in both the memory cell region and the peripheral analog and digital circuit area for capacitance parameter control. Th

集成电路工艺：Deep-submicron process technology Describe such deep-submicron process technology and intended to provide semiconductor engineers and researchers with a comprehensive , state-of-the-art reference about these emerging and leading-edge process.C