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  1. MEMS Torsion-Mirror Actuators for Optical Switching or Attenuating Applications

  2. Novel MEMS torsion-mirror actuators with monolithically integrated fiber self-holding structures are fabricated, and investigated experimentally and theoretically. Their electromechanical and optical characteristics are acceptable for optical switchi
  3. 所属分类:其它

    • 发布日期:2021-02-08
    • 文件大小:809984
    • 提供者:weixin_38531210