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  1. Numerical shaper optimization for sputtered optical precision f ilters

  2. A novel optimization procedure for optical precision sputter coaters with respect to the film homogeneity is demonstrated. For a coater concept based on dual cylindrical sputtering sources and a rotating turn-table as sample-holder, the inherent radi
  3. 所属分类:其它

    • 发布日期:2021-02-08
    • 文件大小:919552
    • 提供者:weixin_38610513