HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other att
− 《SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER》(E4)
− 《SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT》(E5)
− 《GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT》(E30)
− 《HIGH-SPEED SECS MESSAGE SERVICES GE
