文件名称:
PolyMUMPs design handbook
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文件大小: 1mb
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上传时间: 2009-08-30
详细说明： 伯克利mems课程参考用书 Table of Contents Chapter 1: Three-Layer Polysilicon Surface Micromachining Process 1.1 Introduction ................................................................................................................................................... ................... 1 1.2 Process Overview............................................................................................................................................................. 2 Chapter 2: PolyMUMPs Design Guidelines and Rules 2.1 Introduction .................................................................................................................................................................... 11 2.2 Design Rules ................................................................................................................................................................... 12 2.3 Beyond the Design Rules................................................................................................................................................ 31 2.4 Film Parameters ............................................................................................................................................................. 36 2.5 EZ-PolyMUMPs Design Rules.......................................................................................................................................... 38 2.6 Layout Requirements ..................................................................................................................................................... 38 2.7 Die Reservation and Layout Submission........................................................................................................................ 39 2.8 Custom Dicing, Releasing and Critical Point Drying....................................................................................................... 39 2.9 Other Reference Material ............................................................................................................................................... 40 ...展开收缩
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