文件名称:
Fabrication of a complex-shaped mirror
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文件大小: 521kb
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上传时间: 2018-03-06
详细说明： We propose and discuss several fabrication processes for a complex-shaped mirror, which is a fly-eye mirror, used in an extreme ultraviolet lithography (EUVL) illumination system. The mirror has a complex reflective surface consisting of many concave mirror elements that are sections of a sphere; the top of each element is arc shaped. In the present study, we focus on one process in which all elements are fabricated individually and then arranged side-by-side to form the mirror. Thus, as the first step in this process, we fabric ate the arc-shaped elements made of invar with electroless nickel plating. The resultant reflective surfaces have a peak-to-valley (PV) surface accuracy of 0.31 mm. The surfaces have the rms roughnesses of about 0.23 and 0.35 nm in areas of 1103140 mm and 131 mm, respectively. The slope accuracies of the surfaces relative to the bottom surfaces are 2166 and 43 arc-sec in the y and x directions, respectively. Thus, the mirror elements for the fly-eye mirror can be fabricated very accurately with smooth surfaces, although the mirror elements have a special shape compared to that of general optics. ...展开收缩
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