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罗克韦尔 多晶硅生产自动化解决方案.pdf
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Encoders are used for position feedback and
Rockwell Automation offers solutions to help monitor and
tachometers are used for monitoring the speed of the
control the wire saws used to slice the silicon ingots into
cutting wire as it is fed through the wire guides. the
wafers. Central to the solution for wafer slicing equipment is wire guides are usually driven by dedicated motors and
the rockwell Automation Integrated Architecture
the bearing temperature is monitored continuously
Integrated Architecture brings together a powerful
The wire is routed through various pulleys and
multi-disciplined control engine, seamless networking, a
tensioning arms which help keep the wire tension and
scalable visualization platform and the information
movement smooth and steady reducing the risk of wire
technologies needed to help you lower your Total Cost to
leakage
Design Develop and deliver m a machine
A local slurry station or connection to a centralized
Unlike conventional control architectures, the Integrated
slurry delivery system is usually offered as an option
Architecture provides fully integrated, scalable solutions
Slurry and mixing pumps are controlled with variable
using a single control platform and a single development
speed drives to adjust the flow rate of various additives
environment it allows machine builders to build
such as slurry, water, glycol or oil. The slurry also acts as
standardized code with improved access to production and
a cooling agent as the silicon block is sawn the flow
diagnostic information. This helps machine builders shorten and temperature of the slurry is monitored carefully via
design cycles and increase their focus on innovations that
sensors at multiple locations. Air which is also used for
ead to a competitive advantage
cooling is exhausted through an electrostatic cleaning
process before exiting to a central exhaust system
The Allen-Bradley CompactLogix Programmable
Automation Controller(PAC)or ControlLogix PAC can help
An industrial computer running rockwell Software
control the wire saw by taking advantage of the powerful
Factory Talk Historian and Factory Talk view can be used
process control capabilities inherent in the logix engine
for data collection and real-time visualization of the
Kinetix integrated motion control capabilities and the
technological process data. In some cases a single
premier integration of networked drives can also be used
computer acting as a cell controller can monitor
multiple wire saws as they process the silicon blocks
The wafer slicing machine is equipped with a number of
This allows analysis of data from one machine to the
sensors for the optimization and control of the sawing
next from a single location. Production reports with
process. Some machines are equipped with simple
specific process data can be generated. OEE
pushbuttons and pilot lights for the operators to utilize
calculations and reports can also be generated using
while others use a panelview plus m local operator interface
dditional modules included in the Factory Talk
terminal. the panel view plus hmi can display a broader
Integrated Production and Performance Suite (e. g
range of information regarding the machine state,
FactoryTalk Vantage point and FactoryTalk Metrics)
diagnostic messages and troubleshooting guidance From a
maintenance screen, machine parameters like table feed
Advanced process control capabilities will become
rate slurry flow rate slurry temperature wire speed and
increasingly important as the wafer thickness is
tension can be programmed
reduced and thinner wires are used to cut the silicon
ingots. APC offerings from rockwell automation can
Servo motors are used to control the table position and feed help OEMs tighten control variations and optimize the
rate of the silicon blocks as they enter the wire web. Servo
cutting process.
motors are also used to unwind and wind the cutting wire
and maintain tension on the wire used during the cutting
process.
Typical Architecture
Wafer Slicing Equipment
Plant Network
Factory Talk View
Stratix 8000T
Switc
Panelview Plus HM
Trending, Recipe
EtherNeulPTM
EtherNetiP
Connectivity to the
Factory Talk Production and
controlLogix Controler
EtherNetIP
Performance Suite
Flex lo
therNet/IP
SERCOS
Programmable Automation Controler
Process Control
Discrete Control
Connectivity to
Motion Control
Remote I/Q Platforms
Drive Control
(Analog/Digital/Specialty)
SERCOS
Kinetix
EtherNetIP
Servo Drives
oeF色x
Spool
Spool
Vertical Take-Up
Output I
Poo
Rocker
Spool
Water
(Unwind) Spindle(s)
lable
i Adust
Adiust
Slury
Pump
Wire Feed
(Unwind)
(Wind)
Pump
ctivity to Servo
Connectivity to Steppe
Connectivit o
with Integrated Motion
Motors ove EtherNet/IP
Inteligent Drives
Rockwell Automation solutions deliver improved production capabilities and reduced total cost of ownership by providing
unparalleled functionality, flexibility and scalability. Machine builders can respond more quickly to customer or market
demands, reduce maintenance costs and downtime and easily gain access to actionable plant and production information
for improved management and decision-making
Allen-Bradley, Rockwell Software, Integrated Architecture, CompactLogix, ControlLogix, Kinetix, PowerFlex, POINT I/O, Flex, Factory Talk, Stratix 8000, and Total Cost to Design,
Develop, and deliver are trademarks of Rockwell Automation
EtherNet/IP is a trademark of odva
Power, Control and Information Solutions Headquarters
Americas: Rockwell Automation, 1201 South Second Street, Milwaukee, W1 532C4 USA, Tel:(1)414.382, 2000, Fax: (1)414.382 4441
Europe/Middle East/Africa: Rockwell Automation, Vorstlaan/Boulevard du Souverain 36, 1170 Brussels, Belgium, Tel:(32)2663 0600, Fax:(32)2663 0640
Asia Pacific: Rackwell Automation, Level 14, Core F, Cyberport 3, 100 Cyberport Road, Hong Kong, Tel:(852)2887 4788, Fax: ( 852)2508 1846
Publication OEM-AP061A-EN-P- August 2009
Copyright 2009 Rockwell Automation, Inc. All Rights Reserved. Printed in USA
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