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HFSS Spiral Inductor.pdf
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详细说明：本文件官方文档，在软件中也存在案例，现分享出来，可以省去在软件中寻找的时间Getting Started with HFSS: Silicon Spiral Inductor
Conventions Used in this uide
Please take a moment to review how instructions and other useful information are presented in
this guide
Procedures are presented as numbered lists. a single bullet indicates that the procedure
has only one step
Bold type is used for the following
o Keyboard entries that should be typed in their entirety exactly as shown. For example,
copy file1" means the word copy must be typed, then a space must be typed, and then
file 1 must be typed
o On-screen prompts and messages, names of options and text boxes, and menu com-
mands. Menu commands are often separated by carats. For example, click HFSS>Ex
citations> Assign>Wave Port
Labeled keys on the computer keyboard. For example, Press Enter "means to press the
key labeled Enter
Italic type is used for the following
o Emphasis
The titles of publications
Keyboard entries when a name or a variable must be typed in place of the words in italics
For example, copy file name the word copy must be typed, then a space must be
typed, and then name of the file must be typed
The plus sign (+)is used between keyboard keys to indicate that you should press the keys
at the same time. For example, Press Shift+F1 "means to press the Shift key and the F1
key at the same time
Ribbons menu bars and short -cut menus are three methods that can be used to see what com
mands are available in the application
Ribbons are the rectangular area on top of the application window and contain multiple tabs
Each tab has relevant commands that are organized, grouped, and labeled. An example of a
typical user interaction is as follows
On the Draw ribbon tab, click the Box primitive"means you can click the Box icon on the
Draw tab and execute the box command to draw a box
The menu bar(located above the ribbon is a group of the main commands of an application
arranged by category such File, Edit, View, Project, etc. An example of a typical user inter-
action is as follows
On the File menu, click the Open EXamples command" means you can click the File
menu and then click Open Examples to launch the dialog box
Another alternative is to use the short-cut menu that appears when you click the right-mouse
button. An example of a typical user interaction is as follows
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved. -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting Started with HFSS: Silicon Spiral Inductor
Right-click and select Assign Excitation> Wave Port"means when you click the right-
mouse button with an object face selected, you can execute the excitation commands from
the short-cut menu(and the corresponding sub-menus
Getting Help: ANSYS Technical Support
For information about ansYS Technical Support, go to the AnsYs corporate Support website,
http:/ww.ansys.com/support.YoucanalsocontactyourAnsySaccountmanagerinorderto
obtain this information
A ANSYS software files are ascll text and can be sent conveniently by e-mail. When reporting
difficulties, it is extremely helpful to include very specific information about what steps were taken
or what stages the simulation reached, including software files as applicable. This allows more
rapid and effective debugging
Help Menu
To access online help from the menu bar, click Help and select from the menu
HFSS Contents-click here to open the contents of the online help
HFSS Search -click here to open the search function of the online help
Context-Sensitive Help
To access online help from the user interface, do one of the following
To open a help topic about a specific menu command, press Shift+F1, and then click the
command or toolbar icon
To open a help topic about a specific dialog box, open the dialog box, and then press F1
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting Started with HFSS: Silicon Spiral Inductor
Table of contents
Table of contents
Contents-1
1-Introduction
Sample Project- Silicon Spiral Indt
2- Set Up the project
2-1
Launch Electronics Desktop
2-1
Set Tool Options
2-2
Insert HFsS design
2-4
Set model units
2-5
Set Solution Type
2-5
3-Set Up si Spiral Inductor
Create 3D Model for dielectrics
Create Substrate
3-2
Create Oxide
3-4
Create Passivation
3-6
Create Air bod
3-8
Assign Radiation Boundary ...
3-9
Create Ground
3-11
Assign Perfect E Boundary to the ground
3-12
Hide dielectrics
3-14
Create Spiral Inductor Geometry
3-14
Create offset coordinate system
3-15
Create Spiral Path
3-16
Create Polyline freehand
3-16
Create Polyline from the Status Bar
3-21
Assign Thickness to the Spiral
3-23
Create Underpass
.3-25
Create Via1
3-26
Create∨ia2
3-28
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting Started with HFSS: Silicon Spiral Inductor
Create Feed
3-29
Unite Spiral objects
3-30
Seed mesh conductors
3-32
Create Ground Ring
3-34
Create Inner rin
3-36
Complete the Ring
3-37
Create extension 1
3-38
Create Extension 2
3-39
Create Source 1
3-40
Create Source 2
3-41
Group the Conductors
3-42
Assign EXcitation for Source 1
3-42
Assign Excitation for Source2
3-43
Show al
3-44
Boundary Display(optional)
3-44
4-Analyze Spiral Conductor
41
Create Analysis Setup
4-1
Add a Frequency sweep
4-3
Model validation
4-5
Analyze the Model
4-6
Review Solution data
4-6
Review the profile panel
4-6
Review the Convergence Panel
4-8
Review the Matrix Data Panel
4-8
Review the Mesh Statistics Panel
4-9
Generate Reports
4-9
Create S-parameter vs. Frequency Plot
4-9
Custom Equations- Output variables
4-11
Use Output variables for Next Report
4-14
Simulate with solve Inside conductors
4-16
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting started with HFSS: Silicon Spiral Inductor
Results with solve inside
4-17
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting Started with HFSS: Silicon Spiral Inductor
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting Started with HFSS: Silicon Spiral Inductor
1-Introduction
This document is intended as supplementary material to HF SS for beginners and advanced users
It includes instructions to create, simulate, and analyze a silicon spiral inductor model
This chapter contains the following topic
Sample Project-Silicon Spiral Inductor
Sample Project -Silicon Spiral Inductor
In this project, we will use HFSS to create, simulate, and analyze a 2. 5 turn spiral inductor
Figure 1-1 Spiral Inductor
This nominal design consists of the following components with their corresponding dimensions
Spiral: 2.5T, W=15um, S=1.5um, Rad=60um
M6.2um,=28e7S/
Underpass: M5, 0.5um, =2.8e7 s/m
Stackup: Passivation: 0. 7um, r=7.9
Oxide:9.8um. r=40
Substrate: 300um
r=119,=10S/
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved. -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
Getting Started with HFSS: Silicon Spiral Inductor
Passivation
M6
Oxide
M5
Substrate
Figure 1-2 Passivation, Oxide and Substrate
ANSYS Electromagnetics Suite 19. ANSYS, Inc. All rights reserved -Contains proprietary and confidential
information of ansys inc. and its subsidiaries and affiliates
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