超大规模集成电路制造技术，同志们，超好的一本当代用书！ Summary: Fully updated with the latest technologies, this edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium a
We propose and discuss several fabrication processes for a complex-shaped mirror, which is a fly-eye mirror, used in an extreme ultraviolet lithography (EUVL) illumination system. The mirror has a complex reflective surface consisting of many concav
Fabrication of nanocomposites during the crystalline growth of layered double hydroxides using grafted collagen as template，孙艳青，陈小卫，To achieve morphology and size control of layered double hydroxides (LDH) in polymer/LDH hybrid materials, a mineraliz
